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As for this adjustment, adjustment with set state is difficult.
Therefore replace it every Assy when replacing the pulse module.

Display a SUSOUT waveform

Power ON and display a SUSOUT 
waveform

Display a SUS-D waveform

Display a SUS-U waveform

Power ON and 
display a SUS-D waveform

Display a SUS-U waveform

Measuring points of waveform
are refered to next page.

Power ON
Black Mask Screen

Coarse adjustment of
SUS-U, SUS-B, SUS-G

SUS-D adjustment
Adjust the waveform to 20-25ns.

SUS-U adjustment
Adjust the waveform to 20-25ns.

Power OFF

Compare waveform, 

and do harmonize 

almost?

Yes

No

Adjust VR resistance value
of SUS-B and SUS-G to match
VR resistance value of SUS-D
within 

±

 2

Ω

.

Adjust VR resistance value
of SUS-B and SUS-G to match
VR resistance value of SUS-D
within 

±

 2

Ω

.

Power OFF

Adjustment end

SUS-D readjustment
Adjust the waveform to 20-25ns.

SUS-U readjustment
Adjust the waveform to 20-25ns.

X DRIVE

Y DRIVE

SUS-U

VR3203

VR2204

SUS-D

VR3202

VR2203

SUS-B

VR3201

VR2202

SUS-G

VR3200

VR2201

Pulse Module

X DRIVE

Y DRIVE

Upper

Lower

Upper

Lower

SUSOUT

K3105

K3106

K2212

K2203

SUS-U

K3200

K3204

K2220

K2224

SUS-D

K3108

K3205

K2207

K2225

• Pulse module loads in DRIVE Assy as one of heat measures of DRIVE Assy. Adjust the drive timing of the pulse module 

driving parallel with VR.

• Pulse module has each peculiar delay time. Readjustment is necessary when replaced the pulse module in the X and 

Y DRIVE Assys.

CR delay circuit is each inserted on signal path of four control signals (SUS-U, SUS-B, SUS-D, SUS-G) driving 
the pulse module.
Quantity of delay can adjust pulse module of one side with VR.
Adjust VR while measuring a waveform of the pulse module, and match a timing.

Use this sustain pulse
and adjust.

Magnify 6SF block

Magnify the adjustment waveform

Magnify 6SF block

CH1 : Y SUSOUT Under (K2203), 50V/div
CH2 : Y SUSOUT Upper (K2212), 50V/div
CH4 : YPR-U1 (K2038)- Trigger, 5V/div
Trigger : 2msec delay

CH1 : Y SUSOUT Under (K2203), 50V/div
CH2 : Y SUSOUT Upper (K2212), 50V/div
CH4 : YPR-U1 (K2038)- Trigger, 5V/div
Trigger : 2msec delay

CH1 : X SUSOUT Under (K3106), 50V/div
CH2 : X SUSOUT Upper (K3105), 50V/div
CH4 : YPR-U1 (K2038)- Trigger, 5V/div
Trigger : 2msec delay

Timing adjustment of the pulse module control signal adjusts with the sustain pulse of eighth pulse (X DRIVE) and 
the ninth pulse (Y DRIVE) from the back of 6SF.

µ

µ

• Perform adjustment of waveform with a black mask screen.
• It is easy to adjust when turned field AB offset to OFF (RS-232C
  command: OCN) in adjustment.

Note:
• Sampling rate of oscilloscope sets it more than 500MS/s in order
  to perform ns order adjustment.
• Collecting calibration of probe before adjustment by all means.

• Connect GND of probe measuring waveform to SUSGND terminal
  by all means.
• Precise waveform is not displayed, and an adjustment gap may
  occur that does not collect GND properly.

When took waveform be each drive Assy unit, measure it at the 
fourth sustain pulse from the back except for a large width sustain 
pulse.
Therefore, when measured both waveform of the X and Y drives 
together, it becomes the sustain pulse of 8 and 9 pulses from the 
back.

When there is a gap with waveform of CH1 / CH2 of the part which 
enclosed in the following circle, adjust required VR to overlap the 
waveform.

Adjust with SUS-B

Adjust with SUS-U

Adjust with SUS-G

Use this sustain pulse
and adjust.

CH1 : Y SUSOUT Under (K2203), 50V/div
CH2 : Y SUSOUT Upper (K2212), 50V/div
CH4 : YPR-U1 (K2038)- Trigger, 5V/div
Trigger : 2msec delay

CH1 : Y SUS-D Under (K2225), 50V/div
CH2 : Y SUS-D Upper (K2207), 50V/div
CH4 : YPR-U1 (K2038)- Trigger, 5V/div
Trigger : 2msec delay

CH1 : Y SUS-U Under (K2224), 50V/div
CH2 : Y SUS-U Upper (K2220), 50V/div
CH4 : YPR-U1 (K2038)- Trigger, 5V/div
Trigger : 2msec delay

µ

µ

Confirm it to waveform of CH1 / CH2 of the part which enclosed in 
the following circle whether there is not a large gap.
(A gap of the quantity that shifts 20nS and adjusted remains.)

When adjust in the power supply ON state, change so that the 
quantity of gap that adjusted by temperature-rise of the pulse 
module becomes small.
Therefore, perform high power OFF (RS-232C command: DRF) 
except measurement time of waveform when adjusts, and 
adjustment error by temperature-rise does not occur.

20 - 25ns

Lower PM

Upper PM

Lower PM

Upper PM

20 - 25ns

Caution:
Not absolutely mistaking upper
and lower of waveform.

Magnify 6SF block

Magnify 6SF block

Magnify 6SF block

Magnify 6SF block

Magnify the adjustment waveform

Magnify 6SF block

Magnify 6SF block

Magnification

Magnification

Magnification

Magnification

It is necessary to readjust this adjustment when replaced the X or Y DRIVE Assy and the pulse module.

Measurement point of waveform of X and Y DRIVE Assy in timing adjustment is test pin of SUSOUT of the pulse module of
bottom of the main unit.
X DRIVE Assy : K3106     Y DRIVE Assy : K2203
Measurement screen : White mask

The measurement is easy to perform when turns field AB alternation to OFF. (RS-232C command: OCN)

Measure a sustain pulse of the fourth pulse (X DRIVE) and the fifth pulse (Y DRIVE) from the back of the fourth FS, and 
adjust.  In the start section of this sustain pulse, waveform has inflection point with the timing when SUS-B becomes ON. 
Adjust so that the voltage of this inflection point is the nearest to 150V and do not become less than 150V.
Adjustment parameter
X DRIVE: XSUSB (RS-232C command : XSB)
Y DRIVE: YSUSB (RS-232C command : YSB)

Note:
• Connect GND of probe measuring waveform to SUSGND terminal by all means.
• Precise waveform is not displayed, and an adjustment gap may occur that does not collect GND properly.

CH1 : Y SUSOUT (K2203), 50V/div
CH2 : X SUSOUT (K3106), 50V/div
CH4 : YPR-U1 (K2038)- Trigger, 5V/div
Trigger : 2msec delay

Rst

1ms/div

X

X

X

X

X

X

Y

Y

Y

Y

Y

Y

5

µ

s/div

Magnify 4SF block

Measure a waveform of this section and adjust.

Magnify the fourth pulse sustain pulse (XSUSOUT waveform) from the back of the above waveform.

1SF

2SF

3SF

4SF

150V Line

GND

50V/div

100msec/div

50V/div

100msec/div

150V Line

This broken section moves by
changing the adjustment 
parameter.

Become less than 150V.

→

 NG